摘要
研制了一种由环形波导腔环绕直径３０ｃｍ、高５０ｃｍ耐热玻璃圆筒真空室构成的新的大面积微波等离子体源。环形波导内侧开有多个用来激励产生等离子体的狭缝，相邻狭缝间的距离为半个波导波长。利用该装置研究了微波功率、工作气体对氩等离子体特性的影响。静电双探针测量结果表明，当气压在４０－６００Ｐａ，功率在２００－６００Ｗ范围内时，电子温度可达０．８－３．０ｅＶ，离子密度最高达４．３×１０１０ｃｍ－３。
A new large area microwave plasma source has been developed. The source consists of slots on the inner side which acts as a field applicator to sustain a plasma. The plasma is restricted in a Pyrex glass cylinder with an inner diameter of 30cm and a height of 50cm. The distance between slots is one half waveguide wavelength. A double Langmuir probe is used to characterize argon plasma as a function of microwave power, pressure and position. The results indicate that the electron temperature is 0.8-3.0eV and maximum ion density is 4.3×10 10 cm -3 for a microwave power range of 200-600W and a pressure range of 40-600Pa.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1999年第1期16-20,共5页
Nuclear Fusion and Plasma Physics
基金
国家自然科学基金
