摘要
研究采用ＡｌＮ为过渡层在ＺｎＳ红外光学窗口材料上进行金刚石膜保护。还对膜进行结构分析和光学测试。
AlN was used as an interlayer between ZnS, which is an infrared optical windouw material ,and CVD diamond protecting film .The structural and optical properties of the film were analyzed also.
出处
《真空与低温》
1999年第1期21-23,共3页
Vacuum and Cryogenics
