针孔直径对自参考干涉波前传感器测量精度的影响

Effect of pinhole diameter on measurement accuracy of self-referencing interferometer wavefront sensor

针孔直径的大小是影响自参考干涉波前传感器测量精度的重要因素,在实际应用中应根据测量精度要求以及强度通过率来选择.首先基于傅里叶光学理论分析了针孔直径对参考波前质量以及强度通过率的影响,然后通过数值仿真和实验对其进行证实.研究结果表明,当针孔直径等于艾里斑直径的一半时可以产生高质量的参考波前,对于峰谷值不小于一个波长的畸变波前,其参考波前的均方根值低于λ/100.这些理论分析和实验结果可为自参考干涉波前传感器的设计和精度分析提供有价值的参考和指导.

The diameter of pinhole is a critical element that affects the measurement accuracy of self-referencing interferometer wavefront sensor （SRIWFS）,and its dimension is determined by the accuracy requirement of practical measurement and the intensity transmission. The effects of pinhole diameter on quality and intensity transmission of reference wave are analyzed on the basis of the Fourier optics theory,and then they are verified by numerical simulation and experiment. These results demonstrate that to obtain a good approximation to a reference wave,the pinhole diameter should equal half of the Airy-disk diameter produced by an unaberrated optic. In this way,the root-mean-square value of the reference wavefront is less than λ/100 for all aberrations with the peak-to-valley value of not smaller than one wavelength. These theoretical analyses and experimental results provide a valuable reference and illumination for determining the dimension of pinhole along with the analysis or design of SRIWFS for various testing tasks.