电磁辅助纳米压印

Electromagnet-assisted Nanoimprint Technology

纳米压印技术是最近十几年提出的新的图形转移技术,此技术有产量高、成本低和工艺简单的优点,因此得到了飞速的发展。传统的纳米技术有热塑纳米压印技术、紫外固化纳米压印技术和微接触纳米压印技术。近几年又出现了纳米压印技术的新方法,如金属薄膜直写技术、滚轴式纳米压印技术、气压辅助纳米压印技术和静电辅助纳米压印技术。主要介绍利用静电辅助压印技术和气压辅助纳米压印技术相结合的一种新型纳米压印方法,并利用仿真软件Ansys进行仿真,通过仿真实验和理论研究,证明此方法是可行的。

Nanoimprint technology is a new graphics transfer technology, this technology has the advantages of high yield, low cost, simple process, it has made rapid development. Nanoimprint technology conventional thermoplastic nanoimprint lithography, UV -curing nano -imprint technology, micro -contact nano - imprint technology. In recent years, it has emerged nanoimprint new technology methods, such as metal fihns direct writing technology, roller- type nanoimprint technology, pressure -assisted nanoim- print technology, electrostatic - assisted nanoimprint technology. Describe the use of static pressure -assisted imprint technology electrostatic - assisted nanoimprint, supporting a combination of a new type of nanoimprint method, and the use of simulation software ansys simulation, simulation experiments and theoretical studies show that this method is feasible.