300mm离子注入机靶室晶圆传输控制系统设计

Control System Design for Wafer Transmitter of 300mm Ion Implanter

在实现了高效晶圆传输全自动控制的基础上,阐述了靶室晶圆传送系统运动部件的结构和各自的功能;介绍了整个晶圆传输控制系统的设计思路,在采用高性能多轴运动控制卡和机械手模块的硬件基础上,引用了有限状态机对系统软件进行了智能化模型设计。

This paper based on the achievement of Wafer Transmitter system＇ s robotization, describes the configuration and the function of kinematic parts respectively, and introduces the idea of the intelligentized system that adhibit Programmable Multi-Axis Controller and Robot Ann module,and modeling with the idea of FSM（finite state machine）.