摘要
提出了磁性薄膜电感器的改进型等效电路模型。基于改进型等效电路,通过有限元法对薄膜电感器进行仿真研究,分析电感器的各个结构参数以及材料的特性参数对电感器整体性能的影响,并讨论了涡流效应和磁性薄膜对薄膜电感器特性的影响。结果表明选用较高电阻率的磁性薄膜和优化磁路设计,是薄膜电感器设计中必须考虑的问题。
An improved equivalent circuit mode more suitable for micro inductor with magnet- ic films is proposed. Based on the equivalent circuit mode, the influence of structural parameters of the micro-inductor and characteristic parameters of the material as well as the in-film eddy cur- rent effects and the mutual inductance with Finite Element Method was analysed. Results indi- cates that magnetic films with relatively higher resistivity and optimized magnetic circuit have to be considered in film inductor design.
出处
《信息记录材料》
2010年第3期60-64,共5页
Information Recording Materials
关键词
薄膜电感器
等效电路
涡流
film inductor
equivalent circuit mode
eddy current
