高压功率FRED结终端保护技术及其组合优化设计

Optimized Design of Junction Termination Techniques and Combination for High-voltage Power FRED

场板与场限环是用来提高功率FRED抗电压击穿能力的常用终端保护技术,本文分别介绍场板与场限环结终端结构原理和耐压敏感参数,然后采取场板和场限环的互补组合,通过Synopsis公司MEDICI4.0仿真工具优化设一款耐压1200V的FERD器件终端结构,最后通过实际流片验证此终端结构具有良好的电压重复性及一致性。

Field plate and field limiting rings are usually used as junction termination techniques for high-voltage power FRED. The paper introduces the basis theory of them respectively and analyses the influences of the sensitive parameters on avalanche breakdown chm-acteristics. By using Synopsis MEDICI4.0 semiconductor device simulator, a 1200V high blocking voltage power FRED with combination of field plates and field limiting-rings ten-nination structure is designed. Better repeatability and consistency of the breakdown voltage are verified by the experimental results.