摘要
提出了一种测量干涉仪参考镜非旋转对称面形误差的方法。测量波面用36项Zemike多项式来表示，利用Zemike多项式形式的旋转不变性，求解出参考面非旋转对称误差的Zernike多项式系数。测得了Zygo干涉仪参考镜不同装夹应力下的非旋转对称面形误差分布。比对了该方法和N次相对旋转测量法对同一参考面的测量结果，符合较好。分析了测量误差。该方法仅需两次测量，可有效消除干涉仪标准面低频非旋转对称面形误差。
A method to measure rotational variant error of the reference surface is described. The measured wavefronts are fitted by Zernike polynomials. Zernike coefficients of rotational invariant part of the reference surface are obtained utilizing the properties of Zernike polynomials. Rotational invariant reference surface errors of Zygo interferometer under different mounting stress are measured. The same sufrace is tested by this method and N-position rotation method, the results are in close agreement. The measuring error is analyzed. The proposed method could be used to remove the low frequency rotational variant error of the reference surface only by two measurements.
出处
《计量学报》
CSCD
北大核心
2010年第3期219-222,共4页
Acta Metrologica Sinica
基金
江苏省六大人才高峰项目（06-E-030）
教育部博士点基金（20070288010）
