综合自动测试设备动态计量全系统模型研究

Research on Whole-system Dynamic Metrology Model for lATE

针对综合自动测试设备动态计量系统计量时表现的时变性和不确定性，提出将传统计量系统的“黑匣子”模型进行“白化”，在充分考虑计量系统内部单元及系统内外各干扰因素对计量结果影响的基础上，建立全系统的“白化”计量模型，并对动态测量误差进行了溯源，实验表明，该模型实现了动态误差的分解和溯源，满足更高精度的计量需求。

A whitening model instead of traditional black box model in the area of metrology is proposed to resolve the uncertainty and time-varying from IATE dynamic measurement system. The whitening model whole-system is set up and traced the dynamic accuracy considering the effect from inn-system units and other interference factors. The experiment made it clear that the model accomplished the decomposition and traceability of dynamic error and meets the high precise measurement needs.