NiTi薄膜对压电陶瓷材料阻尼性能的影响

The Damping Capacities Effect on NiTi Film to PZT Material

采用磁控溅射法在压电陶瓷（PZT）基体上沉积形状记忆合金NiTi薄膜,经过600℃晶化而制备出PZT/NiTi异质复合阻尼材料,采用X射线衍射仪和扫描电子显微镜等观察分析复合阻尼材料的物相组成及异质间的结合状态,并用相位法评价复合材料的阻尼性能.结果表明,PZT/NiTi异质复合阻尼材料的阻尼性能与PZT类似,但在频率为1.1～1.2 kHz时,其内耗曲线中出现了一个稳定平台.

PZT/NiTi composites were prepared by the method of depositing NiTi films on the PZT substrates by magnetron sputtering method.The phase structure and hetero-structure of the composites were examined by using X-ray diffraction（XRD） and scanning electron microscope（SEM）.A phase method was utilized to research on the damping capacities of PZT/NiTi composites.The results show that the change of damping capacities of PZT/NiTi composites is consistent with PZT,besides appearing a fancy platform about damping value.