多孔氧化铝模板的纳米力学性能测试与分析

Nanomechanics properties tests and analysis of anodic aluminum oxide template

为了掌握多孔氧化铝模板的纳米力学性能,采用二次氧化法制备孔径在30～40nm之间且高度有序的纳米阵列氧化铝模板,并使用扫描电子显微镜(SEM)对其形貌进行表征;在原位纳米力学测试系统上进行微压痕实验,对样品表面力学性能(纳米硬度、模量)进行测试;利用原子力成像功能对实验区域扫描成像,在纳米尺度下观察和分析样品形貌.结果表明,AAO模板在同一深度处对应的硬度、模量值明显高于相应的基体材料铝,膜基体系的抗载能力明显提高;在压入深度为70～240nm时,AAO膜板的硬度和模量值分别为5.8GPa和106GPa,但从深度250nm时开始出现减小趋势;单晶铝与压针的接触为理想刚塑性接触,AAO模板与压针的接触为弹塑性接触.

In this paper,highly ordered porous alumina templates with pore diameter of 30-40 nm were synthesized by a two-step electrochemical anodizing process. In order to research the nanomechanical properties of anodic aluminum oxide templates,scanning electron microscope （SEM） was used to observe their surface morphologies. Nanoindentation test was performed on TriboIndenter,a full featured nanomechanical test instrument. The nanohardness and elastic modulus of surfaces were measured. Meanwhile,the tested areas were observed by atom force microscope,and the morphology was analyzed under nanoscale. The result shows that the values of nanohardness and elastic modulus of the templates are higher than those of single crystal aluminum at the same depth,and the load-resistance of AAO template is reinforced. The nanohardness of AAO at the depth of 70-240 nm is 5. 8 GPa and the elastic modulus is 106 GPa,while at the depth of 250 nm,the elastic modulus decreases. Pressing takes rigid-perfectly plastic contact with single crystal aluminum,and elastic-plastic contact with AAO templates by analyzing nanoindentation and atom force images.