大型精密转台高精度角度微驱动装置的研制

Development of angular micro driving device for large-scale and high accurate turntable

针对用于标定和检测的大型精密转台(要求其定位误差≤±0.5″),研制了高精度角度微驱动装置。介绍了转台的总体结构,给出了角度微驱动装置的驱动原理和构成。该角度微驱动装置主要通过一个角位移转换机构把精密直线位移转化为精密角位移来实现高的角度分辨率,其在驱动转台旋转的过程中几乎不给转台带来轴向力和径向力,因此不影响转台的轴系精度。为了满足定位要求,转台设计采用了粗精结合、二次定位的方法,即先采用力矩电机进行粗定位,然后使用角度微驱动装置来实现精定位。最后,从理论上计算了角度微驱动装置的分辨率并进行了测试和应用验证,证明此角度微驱动装置的分辨率优于0.08″,满足转台定位精度要求。

A high precision angular driving device was developed for a Large-Scale and High Accurate Turntable（its positioning accuracy should be less than 0.5″） for calibration and test of cameras.The whole structure of the turntable was introduced,and the principle and structure of the developed angular driving device were given in detail.By using a new angular displacement conversion mechanism,the angular driving device could convert the straight-line displacement into a angular displacement to obtain a high angular resolution.Meanwhile,the angular micro driving device scarcely generates the axial force or radial force to influence on the axis accuracy in driving turntable.Furthermore,a new positioning method combined coarse and fine positionings was proposed to improve the positioning accuracy,in which a torque motor was used for coarse positioning and the angular driving device for fine positioning.Finally,the angular resolution of the angular driving device was calculated and verified,results show that it is superior to 0.08″ and can meet the requirement of the turntable for positioning accuracy.