T2铜箔精密微冲孔工艺(英文)

Precision Micro-Punching Process of T2 Copper Foil

随着微机电系统的飞速发展,微孔类零件广泛应用于生物医疗、微电子以及纺织印染等领域中,要求尺寸精度高、断面质量和重复性好,并且能够实现低成本批量制造.微冲孔技术具有传统塑性加工工艺的优点,生产效率高,工艺简单,成形件性能好和精度高,非常适合微型零件的低成本批量制造.针对箔板微孔类零件,设计了一套精密微冲孔模具,采用微冲孔技术研究了冲裁条件对微冲孔工艺的影响规律.结果表明,微冲孔过程与传统冲裁类似,经由弹性变形阶段和塑性剪切阶段,最后断裂分离.微孔断面分布仍然包括圆角、光亮带、断裂带和毛刺.随着相对冲裁间隙的增加,最大剪切强度先降低后逐渐增加;随着冲裁速度的增加,铜箔微冲孔过程最大冲裁力和最大剪切强度逐渐减小,微孔断面光亮带高度增加,断面质量提高.最后,在最佳的冲孔工艺即冲裁间隙为5%、冲裁速度为20mm/s的条件下冲出直径为0.4mm质量良好的微孔.

With the development of micro-electro-mechanical system （ MEMS） ,the micro-holes are widely used in the fields of biomedical medical treatment,micro-electronic,textile dyeing devices with high precision,good quality of sheared edge and dimension stability,which can satisfy the industrial demands of low cost and mass production. Micro-punching has advantages of the traditional plastic forming technique in high mass production,simple processing,fine property and high dimensional precision, which is very suitable for mass production of micro-parts. The micro-punching dies were designed and the punching processes of micro-holes were studied in different blanking conditions. The results show that the process of micro-punching is similar to the conventional punching and the process of micro-punching is composed of elastic deformation stage,plastic shearing stage,fracture and separation stage. Moreover, the sheared edge is still composed of rollover zone,shearing zone,fracture zone and bur. In the punching process,the maximum shearing strength firstly decreases and then increases with the increase of the relative blanking clearance. The maximum blanking force and shearing strength decrease with the increase of the blanking velocity. Moreover,the depth of the shearing zone increases and the quality of cross section is improved. In the end,the micro-hole of 0. 4 mm in diameter was manufactured with good quality in the optimum blanking condition of relative blanking clearance of 5% and blanking velocity of 20 mm/s.