硅基光电器件研究进展

Research Development of Silicon Based Optoelectronic Devices

在信息处理和通信技术中，光电子器件起着越来越重要的作用。然而，因为硅是间接带隙半导体，试图把光电子器件集成在硅微电子集成电路上却遇到很大困难。为解决这一困难，人们发展了多种与硅微电子集成电路兼容的光电子器件制造技术。本文介绍最近几年这方面技术的发展情况。

Silicon based optoelectronic devices are increasingly important in information and communication technologies.But attempts to integrate photonics with silicon based microelectronics are hampered by the fact that silicon has an indirect band gap,which prevents efficient electron photon energy conversion.In order to solve this problem,many technologies to make optoelectronic devices which can be compatible with conventional silicon technology have been developed.In this article,we review the deve lopment of these thchnologies.