一种ISO 6级工业洁净室过滤系统的改进方法

An Improved Filtration System for ISO Class 6 Industrial Clean Room

传统ISO6级洁净室的过滤系统通常是3级过滤，即初效、中效和高效过滤，系统阻力很大，为了减少洁净室的能耗，通过用管道式静电除尘器代替高效过滤器改进了洁净室过滤系统，比较了改进后的过滤系统和传统过滤系统对洁净室内含尘浓度、洁净室自净时间、过滤系统阻力的影响，得到了改进后的洁净室过滤系统在换气次数在50—80次／h的范围内既能满足ISO6级洁净室的洁净度要求，又能缩短洁净室白净时问，还能减小过滤系统阻力的结论，为工业洁净室的设计提供一定的参考。

The traditional filtration system for ISO class 6 clean room consists of primary filter ,mexlium efficiency filter and HEPA.In oroler to reduce energy consumption,electrostatic filter in aer supply duct is applied to substitute the traditional onr and the improved fittering system is compared to the traditional one in these aspects ,such as particle concentration ,eleanliness recovery characteristic of the clean room and the rrsistance of the filtration system .The conclusion that when the ventilating rate is between 50 and 80,the improved filtration system can not only meet the cleanliness of ISO class 6 clean room ,but also improve the cleanliness recovery characteristic ,as well as reduce the resistance of filtering ,which can provide some reference for the design of the industrial clean room.