基于原子力显微技术的PZT薄膜铁电性能研究

Study on Ferroelectric Properties of PZT Films Based on AFM Technique

针对现有测试技术不能直接获得纳米尺度铁电薄膜电滞回线的问题,提出了将原子力显微镜与铁电分析仪连用的方法,研究了锆钛酸铅(PZT)薄膜样品的电滞回线。结果表明,应用铁电分析仪与原子力显微镜联用的测试技术能表征铁电薄膜的电滞回线,在无顶电极测试条件下,测试得到的电滞回线很不对称,且剩余极化值较大。

With the aim to obtain the hysteresis loops of the nano scale ferroelectric thin films,we developed an experiment method for the hysteresis loops of PZT film samples by online-operation of TF analyzer and atomic force microscope.The results indicated that the technique could be applied to characterize the hysteresis loops.The hysteresis loops of the PZT thin films were non-uniform,and the obtained polarization was much higher in the absence of top electrode.