一种硅微型加速度计的制备与测试方法研究

A Study of Preparation Technologies and Testing Methods of a Micro-silicon Accelerometer

介绍了硅微型扭摆式静电力平衡加速度计的工作原理、结构设计、制备技术及测试方法，这对于研制硅微型加速度计具有一定的参考价值。

The operation principle, construction design,preparaion technologies and testing methods of the ndcrosilicon electrostatically force-balanced accelerometer withtorsional pendulum are introduced. There is the certain reference value to develop a ndcro-silicon accelerometer.