摩擦条件对掺钨DLC膜摩擦磨损性能的影响

Effect of frictional conditions on tribological performance of W-doped DLC films

本研究利用SEM、AES、XRD、Raman谱仪、纳米压痕仪、划痕仪和球-盘磨损实验机对掺钨DLC膜的微观结构和摩擦学性能进行了研究,结果表明:掺钨DLC膜光滑致密,具有纳米晶碳化钨和非晶碳组成的复相结构;其硬度和弹性模量为19-23GPa和200-228GPa,膜/基结合力好;摩擦系数随着载荷的增加略有增加,转速对摩擦系数的影响较小;当载荷大于1.96N时,磨损率随着载荷增加急剧增大,磨损率随着转速的增加存在一个极小值;DLC膜的磨损主要是由基体塑性变形引起的梯度掺钨DLC膜内部不同亚层之间的剥离和DLC膜的断裂引起的。

The microstructure and tribological performance of W-doped DLC films were studied by SEM,AES,XRD,Raman spectrum,nano-indenter,scratcher and ball-on-disk wearing tester.The results showed that the W-doped DLC films exhibit a smooth and dense surface and a biphase structure composed of amorphous carbon and nanocrystalline tungsten carbide.The hardness and elastic modulus of the films are 19～23GPa and 200-228GPa,respectively,with high film-substrate adhesion strength.The friction coefficient of the films increases slightly with loading,while the influence of film＇s rotary speed on the friction coefficient is unobvious.However,the wear rate of the films increases rapidly with loading,and the rate has a minimum with increasing rotary speed when the loading exceeds 1.96N.The films are worn off mainly because of the stripping between different layers in the gradient W-doping DLC films and the fracture of DLC films,both are due to the plastic deformation of substrate.