小孔流导法测量材料放气率研究

Study on measuring outgassing rate of materials via orifice throughput method

本文介绍了小孔流导法测试材料放气率的原理和方法,分析了影响材料放气率测量的各种因素,讨论了测量范围,提出了改进方法。系统本底是影响测量下限的主要因素,采用双测试室测量本底的方法,可较好的解决这个问题,为材料放气率测量系统的设计提供依据。

The principle and method for measuring the outgassing rate of a certain material via orifice throughput method are presented,The influencing factors on the outgassing rate and measuring range are discussed,and some measures are proposed for improvement.It was found that the lower limit of measuring range is mainly affected by the background of the system,and this problem can be solved by adopting double measuring chamber to measure the background,which provides references for designing a system for measuring the outgassing rate of materials.