摘要
针对真空蒸发镀膜工艺过程的非线性、时变,溅料问题难以控制的特点,在传统的PI控制基础上引进模糊算子,采用模糊PI的控制方法,发挥了PI控制结构简单、适用性强、稳态无误差等优点和模糊控制可以有更快的响应和更小的超调,对过程参数的变化也不敏感,具有较强的鲁棒性,可以克服非线性因素影响的优点,在镀膜工艺中取得了较好的控制效果,并可以推广到同行业和相关领域。
In view of the non-linearity, time-variable, splashes characteristic of the material question to be controlled with difficulty in vacuum evaporation coating technological process, this paper ,introducing the fuzzy operator in the traditional PI control foundation, using fuzzy PI the control method, has displayed that the PI control is of structure simple, the serviceability strong and the stable state unmistakable inferior merits and that the fuzzy control may have a quicker response and a smaller over modulation, is insensitive to the process parameter change, has the strong robustness and may overcome the non-linear factor influence , has obtained the good control effect in the coating craft, and may promote to the same profession and the related field.
出处
《机电工程技术》
2010年第5期71-74,共4页
Mechanical & Electrical Engineering Technology
关键词
模糊控制
PI控制
真空蒸发镀膜
fuzzy control
PI control
vacuum evaporation coating
