纳米结构可重入扫描隧道显微镜系统的研制

Design and test of the nanostructure reaccessible UHVSTM system

本文简介我们最近研制成功的超高真空（ＵＨＶ）扫描隧道显微镜（ＳＴＭ）系统。该系统由于同时安装有扫描电子显微镜（ＳＥＭ），可以使ＳＴＭ的针尖在ＳＥＭ的引导下移到样品表面上任一感兴趣的地方去研究那里的纳米细节，从而使它的ＳＴＭ具有纳米结构可重入性。该系统还有一些特有的样品制备功能，可用于许多有应用价值的研究。

We report the design and test of the new UHVSTM system that consists of a scanning electron microscope (SEM) and a scanning tunneling microscope (STM), along with low energy electron diffraction (LEED), auger electron spectroscopy (AES), as well as some routine and special surface preparation facilities. The major advantage of this configuration lies in the fact that it offers the experimenter the possibility of scrutinizing the sample surface with SEM first and then guiding the STM tip to further examine interesting nanometer scale areas. In this sense the STM is nanostructure reaccessible.