摘要
用无机盐替代锆的醇盐，通过Ｓｏｌ－Ｇｅｌ方法，合成均匀、稳定的ＰＺＴ溶胶。采用Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ基片并加入ＰＴ过渡层，经快速热处理，制备出沿（１００）高度定向的ＰＺＴ陶瓷薄膜，此薄膜具有良好的铁电性能。
A zirconyl nitrate instead of Zr alkoxide has been used as the source of Zr element to get a transparent and stable PZT precursor solutions by sol gel technology The PZT sol was spin coated onto Pt/Ti/SiO 2/Si substrate Meanwhile, lead titanate (PT) film was as a interlayer film between PZT film and the substrate After annealing by RTA method, high oriented texture with good electrical properties have been obtained in the PZT thin film
出处
《材料工程》
EI
CAS
CSCD
北大核心
1999年第2期16-18,共3页
Journal of Materials Engineering
关键词
锆钛酸铅
溶胶-凝胶
铁电薄膜
薄膜
lead zirconate titanate(PZT) sol gel ferroelectric film
