摘要
利用SEM /EDX、XPS及X射线粉末衍射手段 ,对CVDBN陶瓷与金属 (无氧铜、钛 )的接合机理进行了分析 ,并用反应自由焓函数法对CVDBN陶瓷与金属的界面反应作了热力学计算。结论认为CVDBN陶瓷对无氧铜。
The joining mechanism of metals(Ti and oxide free copper) and CVD BN ceramics was studied with SEM/EDX,XPS and X ray powder diffraction techniques.The thermodynamic analysis of the interactions at the metal/CVD BN interfaces was conducted using the free enthalpy function method.Our results have revealed that the interaction and the interdiffusion of CVD BN and the active brazing material are mainly responsible of the air tight joining of metals and CVD BN.
出处
《真空科学与技术》
CSCD
北大核心
1999年第1期25-30,共6页
Vacuum Science and Technology
关键词
化学气相沉积
氮化硼陶瓷
接合机理
金属
Chemical vapor deposition,BN ceramic,X-ray powder diffraction,Free enthalpy function method
