摘要
介绍了 3英寸VGATFT AMLCD的主要缺陷形式。在采用冗余技术的基础上 ,研究了针对不同缺陷形式所应采取的不同的激光修补对策。由于加法激光修补仪价格昂贵 。
The defect classification and the defect formation mechanism of the 3 inch VGA TFT AMLCD were discussed.Based on the redundant technique,different laser repair schemes were suggested to remove different types of defect.Since addition laser repair system is very expensive,a low cost,novel addition laser repair process using subtraction laser repair has been successfully developed.
出处
《真空科学与技术》
CSCD
北大核心
1999年第1期47-52,共6页
Vacuum Science and Technology
关键词
有源矩阵
液晶显示
激光修补
冗余技术
Active matrix,Liquid crystal display,Laser repair,Redundant technique