摘要
在周期多层膜基础上，采用随机数方法找到适当的非周期膜系，极大地提高了反射光通量，并给出了整体设计步骤。模拟计算结果表明非周期多层膜能扩展带宽和提高反射率积分值。在１２．４～２０．１ｎｍ波段内，最佳非周期多层膜与峰值在中心波长λ＝１６．２５ｎｍ处的周期多层膜相比，理论积分反射率提高了７５％。
A random method used for improving light throughput of a soft X ray multilayer mirror has been developed. It is demonstrated that layer thickness disorder yields band broadening and increased integrated reflectivity,and achieved 75% increase in integrated reflctivity in the 12.4～20.1nm spectral range with respect to periodic multilayer with its first Bragg peak in the center of that range.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
1999年第1期23-26,共4页
High Power Laser and Particle Beams
基金
国家自然科学基金
国家863激光青年科学基金
关键词
非周期
多层膜
软X射线
随机数
积分反射率
disordered multilayer, soft X ray, random number, integrated reflectivity
