(Au,Ag)/Si复合纳米颗粒薄膜的微结构与光谱特性

MICROSTRUCTURE AND ABSORPTION SPECTRA OF (Ag,Au)/Si NANOCOMPOSITE FILM 

采用复合靶共溅射方法制备了（Ａｕ，Ａｇ）／Ｓｉ复合纳米颗粒薄膜，分别采用ＭａｘｗｅｌＧａｒｎｅｔ理论和微分有效媒质（ＤＥＭ）理论计算了Ａｇ／Ｓｉ复合薄膜的吸收光谱，实验测量结果与ＤＥＭ理论计算更接近，讨论了（Ａｕ，Ａｇ）／Ｓｉ体系复合薄膜共振吸收峰宽化的微观机制．

Abstract Ag,Au)/Si nanocomposite films were deposited using the rf co sputtering method. The absorption coefficient of Ag/Si nanocomposite film was calculated based on the Maxwell Garnett theory and differential effective medium(DEM) theory;the experimental results of spectra agreed with the DEM theory.And the possible microstructure and the reason why the plasma resonance absorption peaks were broadened have been discussed.