衍射光学二维激光扫描器设计制作研究

Design and Fabrication of 2 Dimension Laser Scanner Using Diffractive Optical Elements

提出、设计并采用激光直写和反应离子刻蚀技术制作出一种新型的衍射光学纯相位型二维激光扫描器，并进行了系统参数的实验测试，其扫描角度为２５°×２５°，衍射效率为４１％。

A new kind of diffractive 2 dimension laser scanner is proposed, designed and fabricated using laser direct writing (LDW) and reactive ion etched (RIE). The scanner is tested and the parameters of the 25×25 degrees scanning range and 41% diffractive efficiency are obtained.