激光数字光学平面玻璃表面检测系统技术研究

Technology Research on Optical Glass Surface Inspection System with Laser Quantizing Technique

干涉波面数字化和测量分析处理方法是激光数字平面检测系统中的核心技术,只有掌握了此核心技术的关键内容,才能够真正实现对光学平面的快速高精度检测。对光学干涉波面的拟合函数系的选择、拟合算法、系统像差以及被测表面平面误差类型进行了理论分析和算法优化,并进行了实验测试,完成了系统的构建。发现了Zernike多项式阶选择法则,提出被测光学表面误差类型的判别标准以及一种全新的在"Zernike像差空间"确定激光数字光学平面检测系统精度的理论和方法,为实现检测自动化奠定了理论基础。

The digitizing and measuring analysis method of interference wave surface is the core technology of the laser digital surface inspection systern. It can inspect optical glass surface rapidly and with high precision. The choice of the fitting de partment, algorithm, system aberrations, and the type of measured surface error are analyzed theoretically. The algorithm of fitting interference wave surface is optimized, and experiments have been done in the research. The principle to choice Zernike polynomials order and the distinguishing standard to measure the superficial shape type are found. A novel theory and method are proposed to define the system accuracy in Zernike aberration space.