8Lu F X,Zhong G F,et al.A new type of DC arc plasma torch for low cost large area diamond deposition[J].Diamond and Related Materials,1998,7/6:737-741.
2[1]Sussmann R S, Coe S E. CVD Diamond: A New Engineering Material for Thermal, Dielectric and Optical Applications. Industrial Diamond Review, 1998, 3: 69
3[2]Malshe A P, Park B S, Brown W B , et al. A Review of Techniques for Polishing and Planarizing Chemically Vapor-deposited (CVD) Diamond Films and Substrates. Diamond and Related Materials, 1999, 8: 1198
4[3]Yoshikawa M. Development and Performance of a Diamond-film Polishing Apparatus with Hot Metals.Diamond Optics III. SPIE 1325, 1990. 210
5[4]MalsheA P, Ozkan A M, Brown W D. Sequential Multiple-laser-assisted Polishing of Free-standing CVD Diamond Substrates. Diamond Rlat Mater, 1997, 6: 1789
6[5]HirataA, Tokura H, Yoshigawa M. Smothing of Chemically Vapour Deposited Diamond Films by Ion Beam Irradiation, Thin solid films, 1992, 212: 43
7[6]Field J E. The Properties of Natural and Synthetic Diam- ond. London: Academic Press, 1992
5Silva F, Achard Brinza J, Bonnin X, et al. High quality, large surface area, homnepitaxial MPACVD diamond growth [ J ]. Diamond & Related Materials, 2009,18 ( 5-8 ) : 683-697.
6Liang Qi, Yan Chihshiue, Mao Hokwang, et al. Recent advances in high-growth rate single-crystal CVD diamond [ J ]. Diamond & Related Materials, 2009,18 (5-8) : 698-703.
7Ratnikova A K, Dukhnovsky M P, Yu Yu Fedorov, et al. Homoepitaxial single crystal diamond grown on natural diamond seeds (type IIa) with boron-implanted layer demonstrating the highest mobility of 1150 cm2/V at 300 K for ion-implanted diamond[ J]. Diamond & Related Materials,2011,20 (8) : 1243- 1245.
8Achard J, Silva F, Brinza 1, et al. Thick boron doped diamondsingle crystals for high power electronics [ J ]. Diamond & Related Materials, 2011,20(2) : 145-152.
9Friel I, Clewes S L, Dhillon H K, et al. Control of surface and bulk crystalline quality in single crystal diamond grown by chemical 'apour deposition [ J ]. Diamond & Related Materials, 2009,18 ( 5- 8) : 808-815.
10Betzel G T, Lansley S P, McKay D, et al. Reproducibility of CVD diamond detectors for radio therapy dosimetry [ J ]. Nuclear Instruments and Methods in Physics Research, 2012, A691 ( 1 ) : 34-38.
