测量介质材料复介电常数的准光腔法

The Method of Quasi-optical Resonator for the Measurement of Complex Permittivity of Dielectric Materials

针对介质材料,介绍了在毫米波段和亚毫米波段能够准确测量其复介电常数的准光学谐振腔法。准光学谐振腔具有高Q值、使用简便、样品放置容易等许多优点,能够有效地完成介质材料电介质参数精密测量的任务。这种谐振腔为半球型并由一个平面镜和一个凹面铜镜组成,采用固定腔长法或固定频率法进行测量。另外,还介绍了准光学谐振腔的测试系统和最新的研究成果及改进方法,例如测量多层薄膜及在更高频段的测量方法。

A method for the measurement of complex permittivity of dielectric materials at millimeter wave and submillimeter wave bands by means of an electromagnetic open resonator is introduced.Quasi-optical resonators,which have advantages such as high quality factor,easy to run and to place sample,can accomplish electrical dielectric parameter measurement of dielectric material effectively.The resonator is of the hemispherical type and consists of one plane and concave copper mirror.Quasi-optical resonator system and newest research result and improvement method by using fixing resonator length method or fixing frequency method are also covered with the measurement on some multilayered films and measurement method at high frequency as examples.