MEMS新型光纤加速度传感器设计

Design of a New Optical Fiber MEMS Accelerometer

由于微机械系统的广泛应用,微加速度传感器的设计日趋多元化,现给出一种光强调制型麦克尔逊微光纤加速度传感器,阐述了该种干涉型光纤加速度计的结构设计及工作原理,仅使用光纤进行传输,有效地避免了光纤各类形变造成的影响。

Due to the extensive application of micro-mechanical systems,the design of micro-accelerometer is an increasingly diversified,a fiber-optic accelerometer based on Michelson intensity modulation is presented and the structure design and operational principle of the fiber-optic accelerometer are expatialed,using only one optical fiber for transmission,to avoid the impact of various types of deformation.