期刊文献+

高分辨率微通道板制造技术 被引量:2

Manufacture Technology of Microchannel Plate with High Resolution
原文传递
导出
摘要 采用玻璃多纤维拉制(GMD)技术研制并批量生产了微小通道(孔径4~5μm)还原铅硅酸盐玻璃微通道板(MCP),空间分辨率达到95lp/mm。优选皮-芯-实体边玻璃组合,解决了小通道实体边MCP制板过程中发生变形、破裂的难题;开发新的拉丝设备和技术以及细小直径单纤维的排棒、复式纤维的排屏工艺和相应的技术设备,保证单复丝拉制过程中纤维的尺寸误差不大于0.5%,解决了MCP增益的均匀性难题,实现了两步法拉丝制作孔径5μm以下MCP的工艺方法。制作的MCP平均孔径5μm,厚度为0.25mm,增益大于1×104(900V)。 The reducing lead silicate glass microchannel plate(MCP)with 4-5 μm channel is produced by the glass multifiber draw(GMD)technology,and its resolution is 95 lp/mm.The crack and twist of MCP during production can be avoided by optimizing the glass group of the skin,core and solid border.The dimensional error of fiber is within 0.5% during fiber-drawing by developing new fiber-drawing machines and techniques,arranging slender-diameter mono-fiber and multi-fiber stick.By these ways,the problem of gaining uniformity of MCP is solved.MCPs with less than 5 μm channels were made by the method of two-step stick-drawing.The channel diameter of MCP is 5 μm,thickness is 0.25mm,and gain is 1×10^4(900 V)on average.
出处 《激光与光电子学进展》 CSCD 北大核心 2010年第6期97-101,共5页 Laser & Optoelectronics Progress
关键词 微通道板 微小通道 多纤维拉制技术 玻璃 纤维 microchannel plate small channel glass multifiber draw glass fiber
  • 相关文献

参考文献9

二级参考文献26

共引文献28

同被引文献18

  • 1L. M. Goncalves, J. M. Rocha, C. Couto et al.. On-chip array of thermoelectric Peltier microcoolers[J]. Sensors and Actuators A, 2008, 145-146: 75~80.
  • 2Peng Liang Ci, Shi Jing, Fei Wang et al.. Novel thermoelectric materials based on boron-doped silicon microchannel plates[J]. Mater. Lett., 2011, 65(11): 1618~1620.
  • 3S. M. Shank, J. Soave, A. M. Then et al.. Fabrication of high aspect ratio structures for microchannel plates[J]. J. Vac. Sci. Technol. B., 1995, 13(6): 2736~2740.
  • 4徐泰然. MEMS和微系统—设计与制造[M] 北京: 机械工业出版社, 2004.
  • 5Zhao Zhigang, Bai Caili, Guo Jinchuan et al.. Fabrication of wall array by electrochemical etching of n-type silicon[C]. SPIE, 2007, 6836: 68360W.
  • 6V. Lehmann, H. FoII. Formation mechanism and properties of electrochemically etched trenches in n-type silicon[J]. J. Electrochem. Soc., 1990, 137(2): 653~659.
  • 7程耀进,向世明,师宏立.三代微光像增强器分辨力计算理论模型[J].应用光学,2007,28(5):578-581. 被引量:16
  • 8章小鸽.硅及其氧化物的电化学[M].北京:化学工业出版社,2004:39-81.
  • 9刘恩科,朱秉升,罗晋生.半导体物理[M].北京:电子工业出版社,2003.48
  • 10王丽,尚晓星,王瑛.微光夜视仪的发展[J].激光与光电子学进展,2008,45(3):56-60. 被引量:15

引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部