光纤白光干涉测量术新进展

Progress in Fiber Optic White-Light Interferometry

与激光干涉测量技术相比,光纤白光干涉(WLI)测量术一个最大的优势是能够绝对测量静态的物理参数。综述了近年来国内外在光谱域光纤白光干涉测量技术领域所做的研究工作,重点阐述各种基于相位测量的光纤白光干涉测量法,包括干涉级次法、傅里叶变换相位法、傅里叶变换相对测量法、波长扫描测量法和相移测量法。其目的是为了解决光谱获取问题、测量分辨率问题和自动测量问题,实现光纤白光干涉测量技术的仪器化和工程化。

Fiber optic white-light interferometry（WLI） possesses a considerable advantage with regard to the ability to provide absolute and unambiguous measurement,comparing to laser interferometry.The research on fiber optic white-light interferometry in recent years is reviewed in this paper,and fiber optic WLI based on phase measurement method is focused,including interference-order method,Fourier-transform WLI,Fourier-transform relative WLI,wavelength-scanning WLI,and phase-shifted WLI.The main problems,such as spectrum acquirement,measurement resolution and automatic measurement,are solved in the work in order to accelerate the technique in instrumentation and engineering application.