介质阻挡放电等离子体及其在材料制备中的应用

Dielectric Barrier Discharge Plasma and Its Application in Materials Preparation

介质阻挡放电等离子体(Dielectric barrier discharge plasma,DBDP)是一种在大气压下即可发生的低温等离子体,具有电子浓度大、电子平均能量高的特点,因此,DBDP应用在材料制备中具有独特的优势。综述了DBDP的发展历史、产生机理和基本特征、放电参数及其影响等,重点介绍了DBDP在臭氧发生、有机物合成、薄膜制备、材料表面改性、高能球磨等领域的应用,分析了研究中存在的主要问题及相应的解决方法,以期为相关领域的研究提供参考。

Dielectric barrier discharge plasma（DBDP） is a kind of non-thermal plasma with large concentration of high-energy electrons which can be generated in atmospheric pressure, thus the DBDP technology has unique advantages in materials preparation. In this paper, the developing history, mechanism and characteristics, discharge parameters and their effection, which emphasized on ozone production, synthesis of organic compound, thin film preparation,material surface modification, high energy ball milling and so on,are reviewed.