摘要
采用超声喷雾热解法在石英玻璃衬底上生长出不同组分的宽禁带Mg_xZn_(1-x)O薄膜(x=0、0.08、0.16、0.25)。通过X射线衍射(XRD)、扫描电子显微镜(SEM)和分光光度计等分析测试手段对Mg_xZn_(1-x)O薄膜的晶体结构、透光性及禁带宽度进行了研究。结果表明,随着Mg含量的增加,Mg_xZn_(1-x)O薄膜仍然保持着ZnO的纤锌矿结构,没有生成MgO相,Mg可以有效地溶入ZnO的晶格中。Mg_xZn_(1-x)O薄膜具有良好的透光性,在可见波段的光透过率达85%以上;此外,随着Mg含量的增加,Mg_xZn_(1-x)O薄膜的吸收边出现蓝移现象,禁带宽度从3.30eV增大到3.54eV。
Different Mg content of large band gap MgxZn1-xO（x=0,0. 08,0. 16,0. 25） thin films are deposited on quartz glass by ultrasonic spray pyrolysis（USP） method. X-ray diffraction（XRD）, scanning electron microscopy （SEM） and spectrophotometer measurements are employed to analyze the crystallinity,optical properties and band gap of the films. The results show that the films remain ZnO wurtzite structure and have no any impurity phase with the increase of Mg content,and the Zn^2＋ are successfully substituted by Mg^2＋ in ZnO lattice. All the films have execllent transparence, and the average transmittance for the visible wavelength region is more than 85%. In addition, there is an obvious shift of the absorption edge to shorter wavelength（bule shift） with the increase of Mg content. In the meantime, its band gap energy increases from 3. 30eV to 3. 54eV.
基金
广西教育厅基金(桂教科研200734)
广西信息材料重点实验室研究基金(PF090549)
