多功能细胞传感器集成芯片的设计及实验研究

The Research on Integrated Cellular Chip Based on Multifunction Cell-based Biosensor

为了实现对细胞的生长凋亡等状态和电兴奋细胞的胞外电场及胞外离子代谢的同步检测,本研究提出了将具有对应功能的叉指电极(IDE)、微电极阵列(MEA)、光寻址电位传感器(LAPS)集成在单片硅基底上,设计了细胞多功能检测的集成芯片。在集成芯片的设计上,各功能模块采用多通道布局,并且优化了电极尺寸、电极间排布、电极表面特性处理等方面的设计,以减少电极之间干扰并提高性能。在加工方面利用SiO2层同时作为MEA、IDE的绝缘层和LAPS的保护层,采用微加工技术将三种传感器融合加工于同一硅基底上。器件的评估结果显示,3种传感器的性能和相应的单独设计芯片性能相近,且满足生物相容性的要求。本集成芯片成功弥补了传统细胞传感器检测参数单一的缺陷,建立了细胞多生理参数检测的细胞传感器平台。

In order to monitor the process of cellular metabolism and electrophysiology,we developed a novel biochip,on which interdigited electrodes（IDE）,microelectrode arrays（MEA） and light-addressable potentiometric sensor（LAPS） were integrated.It can be used in real time detection of cell-electrode impedance,extracellular field potential and cellular ionic metabolism.In the design,the three parts of functions were integrated in a multi-channel way.The size of electrodes,inter-electrode distance and surface properties of electrodes were optimized to reduce the electric disturbance between electrodes and in the mean time to improve performance.In the fabrication,the SiO2 layer was used as the insulation layer of MEA and IDE as well as the protective layer of LAPS,by which three types of sensors were integrated onto a single silicon wafer compatibly.The testing result showed that this integrated cellular chip could provide more than a single parameter with similar performance of separately fabricated chips.Above all,it would be a potential platform to study the electrophysiology and metabolism of cells,and further the pharmacological assays and bionic research.