多弧离子镀(Cr,Ti,Al,Zr)N多组元超硬梯度膜的结构及性能

Microstructure and Properties of (Cr,Ti,Al,Zr)N Multi-Component Super-Hard Gradient Films Deposited by Multi-Arc Ion Plating

(Cr,Ti,Al,Zr)N梯度膜性能优异。采用多弧离子镀技术,使用Ti-Al-Zr合金靶和Cr单质靶在高速钢表面制备(Cr,Ti,Al,Zr)N多元超硬梯度膜,利用扫描电镜、能谱、X射线衍射仪、硬度计、划痕仪对膜层形貌、成分、结构、硬度、附着力进行分析,并通过热震性能试验考察了膜层的抗热震性能。结果表明:制备的膜层为面心立方结构,择优生长取向为(220)面;与TiN,(Ti,Al)N,(Ti,Cr)N,(Ti,Al,Zr)N等硬质膜相比,制备的(Cr,Ti,Al,Zr)N多元梯度膜具有更高的硬度和膜/基附着力,硬度可达4400HV,膜/基附着力大于200N,实现了从硬质膜到超硬膜的转变;膜层中N含量梯度可有效减少应力集中,Cr,Al含量的增加有利于提高膜层抗热震性能;负偏压对膜层硬度影响较大,对膜层成分、结构、抗热震性能影响较小,对膜/基附着力基本无影响。

(Cr,Ti,Al,Zr)N multi-component super-hard gradient films were prepared from Ti-Al-Zr alloy targets and Cr targets by using multi-arc ion plating (MAIP) technology.The morphology,com-position,microstructure,hardness and adhesion to substrate of the films were analyzed by using scanning electron microscope,energy dispersive spectrometer,X-ray diffractomter,hardness meter and scratch tester.Besides,the thermal shock resistance of the films was evaluated.Results indicate that ( Cr,Ti,Al,Zr) N multi-component super-hard gradient films have face centered cu-bic structure and preferential grow direction along (220) plane.As compared with hard films like TiN,(Ti,A1)N,(Ti,Cr) N and (Ti,Al,Zr)N,(Cr,Ti,Al,Zr)N multi-component super-hard gradient films had higher hardness ( as high as 4 400 HV) and adhesion to substrate (above 200 N) ,belonging to super-hard films.At the same time,N with gradient distribution in the films was beneficial to decreasing stress concentration,and Cr and Al with high contents were beneficial to increasing the ther-mal shock resistance of the films.Moreover,negative bias had a significant effect on the hardness of the coating,but had a minor effect on the composition,microstructure and thermal shock re-sistance of the films and almost no effect on adhesion to sub-strate.