摘要
基于磁流变液制作的X向、Y向磁流变阻尼固紧器,采用新颖的横向卧式结构,解决了传统纵向立式阻尼固紧器磁流变液溢出密封和摩擦初始阻尼力较大的问题。该固紧器具有柔性阻尼和无冲击固紧工作台的双重功能,减弱了传统固紧方法带来的冲击和直线电机驱动引起的振动,并成功应用于纳米三坐标测量机,使工作台在X向、Y向的分辨率达到5nm,定位稳态波动从原来的20nm减小到5nm。
A MRF locking damper herein based on MRF adopted novel horizontal structure.It can solve the contradiction between the seal of MRF and the larger initial frictional damping force for the vertical structure.Furthermore it has flexible damping and can lock the working table without impact,which reduces the impact brought by traditional locking method and the vibration caused by the linear electric motor＇s driving.It is successfully applied to Nano-CMM and makes sure that the resolution of the working table achieves 5nm in X,Y direction and the positioning steady-state fluctuation is improved to 5nm from primary 20nm.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2010年第12期1477-1480,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50775063)
