摘要
划片机是最关键的集成电路封装设备,高速空气静压电主轴是划片机的核心部件。从主轴结构出发,研究空气轴承、主轴电机、动平衡、转子与旋转轴的联接、精密加工、主轴热变形的控制等高速空气静压电主轴的关键技术。
Dicing saw is one of the most important equipments for IC back-end packaging. Air spindle is the core component for Dicing saw. According to air spindle’s structure, the key technologies of air spindle including air bearing, spindle motor, dynamic balance, joining of rotor and spindle, precision machining, control of spindle’s thermal deformation are studied in this article.
出处
《电子工业专用设备》
2010年第6期16-20,共5页
Equipment for Electronic Products Manufacturing
基金
国家科技重大专项:极大规模集成电路制造装备与成套工艺国家科技重大专项
封装设备关键部件与核心技术项目
高速空气静压电主轴课题(2009ZX02021-001)资助项目