相位测量轮廓术中正弦光栅的构造及频谱分析

Structure and spectrum analysis of quasi-sinusoidal grating in phase measurement profilometry

为了获得三维物体表面的正弦光强投影分布,提出了矩形光栅组合准正弦投影光场的方法。选择适当的光栅组合参数,可得到一个近似的正弦分划板。频谱分析和光学实验验证了设计的合理性。模拟了光栅投影的光强分布曲线,建立了组合准正弦光栅的数学模型,并对构造的准正弦光栅进行了频谱分析。其频谱分布与正弦振幅光栅的傅里叶变换频谱具有相同的特点。研究结果为刻划正弦光栅的设计和理论研究提供了有益的思路。

In order to project sinusoidal fringe patterns onto the 3-D diffuse surface in the phase measuring profilometry（PMP）,this paper presents a new method for designing quasi-sinusoidal grating.The sinusoidality of the image of the grating is improved by projecting such a grating onto an object surface by structured illumination,and by selecting the appropriate parameters of combination grating.The paper introduces the simulation of curve of intensity distribution and the development of the mathematical model of the designed quasi-sinusoidal grating,and the spectrum analysis of the quasi-sinusoidal grating.The fast Fourier transform spectra of the designed quasi-sinusoidal grating is of the same characteristics as the sinusoidal amplitude grating.The results provide a useful approach to design of quasi-sinusoidal grating.