(Ti,Al)N/Ti_2AlN涂层的制备

PREPARATION OF(Ti,Al)N/Ti_2AlN COATINGS

利用电弧离子镀技术在不锈钢基体上沉积了Ti-Al-N涂层,研究了沉积工艺参数对沉积态涂层的成分及相组成的影响,以及在不同退火处理条件下各涂层组织的变化.XRD结果表明,通过改变沉积工艺参数可以控制沉积态涂层的成分,使涂层经退火后生成Ti_2AlN相.适当成分的沉积态涂层退火生成Ti_2AlN相所需的最低退火温度为650℃,其它沉积态涂层在700℃或更高温度下退火才能生成Ti_2AlN相;退火过程中可能发生的化学反应为:AlTi_3N+5Al→TiN+2Al_3Ti和AlTi_3N+3Al→Ti_2AlN+Al_3Ti.此外,延长退火时间可使相同工艺下的沉积涂层生成的Ti_2AlN相含量略有增加.利用SEM对涂层进行了分析,测量了涂层的摩擦系数.

Ti-Al-N coatings with different Ti,Al and N contents were deposited on 1Cr18Ni9Ti stainless steel substrate by vacuum cathode arc ion plating（AIP） method and the as-deposited coatings were annealed under different conditions.The compositions and phases in the as-deposited coatings were also analyzed and compared.The XRD results showed that the composition of the coatings could be controlled by changing the deposition parameters and distinct Ti_2AlN phase existed in the annealed coatings.The Ti_2AlN phase could not appear unless the annealing temperature reached 650℃.The reactions during the annealing process can be described as AlTi_3N＋5Al→TiN＋2Al_3Ti and AlTi_3N＋3Al→Ti_2AlN＋Al_3Ti.The content of Ti_2AlN phase increased slightly by extending the annealing time.The surface morphology and composition of the annealed coating were analyzed by SEM and the friction coefficient of the coating was measured.