摘要
本试验采用溶胶-凝胶工艺在印有电极的石英玻璃表面，通过浸渍-提拉法制备稀土离子掺杂的TiO2-20wt％SnO2复合薄膜．研究当测试频率为0．01kHz时，烧结温度和稀土掺杂量对薄膜湿敏性能的影响．试验结果表明：在400℃和500℃下烧结的薄膜的湿敏性能要优于在600℃和700℃烧结的薄膜的湿敏性能；掺杂稀土离子的薄膜的感湿性能得到了改善，固有阻值降低；400℃烧结的0．5wt％La2O3掺杂的薄膜在45～95RH％湿度范围内阻抗值下降两个数量级；500℃下烧结的0．2wt％CeO2掺杂的薄膜在25～95RH％湿度范围内阻抗值下降两个数量级．
In this paper,the use of sol-gel method for preparing RE-doping TiO-2-20wt%SnO-2 films on quartz glass plates is introduced. The films＇ surface is pre-printed with comb-like Ag electrode by way of dip-coating. The effects of sintering temperature and RE-doping on humidity sensing properties of films are studied at the measuring frequency of 0. 01 kHz. Experimental results show that the assemblies which are sintered at 400℃ and 500℃ appear better humidity sensitivity than those sintered at 600℃ and 700℃. The humidity sensitivity is improved through RE-doping and the intrinsic impedance is decreased. The impedance of 0. 5wt% of La2O3 doped film sintered at 400 ℃ decreases by two orders of magnitude in the humidity range of 45-95 RH% ,while the impedance of 0. 2wt% of CeO2 doped film sintered at 500 ℃ decreases by two orders of magnitude in the humidity range of 25-95 RH%.
出处
《内蒙古工业大学学报（自然科学版）》
2010年第2期93-99,共7页
Journal of Inner Mongolia University of Technology：Natural Science Edition
基金
国家自然科学基金项目资助(50562003)
