摘要
阐述了我国高纯气体应用现状,强调了在电子工业生产中,特种高纯气体在大规模集成电路、液晶显示器、多晶硅和薄膜太阳能电池、新型电光源、光电半导体器件、光纤通讯器件中的应用;在化学测量质量保证中,校准测量体系,评价分析方法的可靠性,检测分析仪器性能,实验室间检测能力比对中的应用;在工业生产中,在单项测量仪器或在线流程分析仪器中作为"零点气"的应用。
This paper expounds the status of application of high purity gas,it stresses the application of special high purity gas in large scale integrated circuit,liquid crystal display,solar cell of polycrystal silicon and thin film,new type electro-optical power,photoelectrical semiconductor device,optical fiber communication device in electronics industries;the application of high purity gas in calibration of measurement system,reliability of analytical method,examination of performance of analytical instrument,contrast detecbatility between various laboratory in quality assurance of chemical measurements;the application of ＂zero point＂ gas in individual measurement instrument or on-line analytical instrument in industrial technological process.
出处
《低温与特气》
CAS
2010年第3期7-9,22,共4页
Low Temperature and Specialty Gases
关键词
高纯气体
电子工业
质量保证
“零点”气体
high purity gas
electronics industry
quality assurance
＂zero point＂ gas
