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金刚石膜的声学特性及其应用 被引量:4

Acoustic Properties and Applications of Diamond Films
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摘要 金刚石具有最高的声传播速度和极高的杨氏模量,以及优异的机械和化学性能,在声学方面具有广阔的应用前景。本文介绍了金刚石膜的声学特性和在声学方面的一些应用,以及国内外有关研究开发的情况等。 Diamond has the highest acoustic velocity,high Young's modulus and excellent mechanical and chemical properties,so have broad application in the field of acoustic devices.This article describes the acoustic properties of CVD diamond and some applications,as well as their research and development situation.
出处 《硅酸盐通报》 CAS CSCD 北大核心 2010年第3期644-650,共7页 Bulletin of the Chinese Ceramic Society
关键词 金刚石膜 声学特性 应用 声表面波器件 diamond film acoustic properties application SAW device
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参考文献27

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