等离子作加工中的计算机建模

Computer Modeling of Plasma Processing

介绍了等离子体刻蚀和沉积加工的工业应用,指出在产品加工和设计中,计算机建模的重要性和必要性,强调了等离子体刻蚀反应器、热喷射系统和等离子体化学蒸气沉积中所使用的计算机模型。

This work introduce the applications of plasma processing for etching and deposition to industry. It is presented that importance and nessecerry on modeling in produce processes and design. Computer modeling modes used in plasma etching ractors,thermal spray system and plasma enhanced chemical vapor deposition are given.