一台可产生直流束和微秒脉冲束的ECR离子源

An ECR Ion Source in Which Both the Direct Current Beams and the Microsecond Pulse Beams Can Be Produced

ECR离子源与其他离子源相比具有一些优点。例如在放电室中具有较低的工作气压,能产生均匀的高密度等离子体,由于无热阴极可耐腐蚀气体,工作寿命长、发射度小、高原子离子比和束流强度大。所以,应用在中子发生器中具有良好发展前景。专门应用于中子发生器的ECR离子源既可引出直流离子束,又可引出微秒脉冲离子束。介绍了这种ECR离子源的工作原理和结构,给出了测量到的主要参数和脉冲波形。

ECR ion source have some advantages over other sources , such as a wide range of operating pressures inside the discharge chamber,the possibility to produce the homogeneous high density plasma, the possibility to work with aggressive gases due to the lack of a heated cathode, long lifetime, small emit- tance of the ion beam, high atomic component of the ion beam and high ion beam current. They will has a well development in the application of neutron generator. Recently, we have established an ECR source that is specially used in the neutron generator. Both the direct current ion beams and the microsecond pulse ion beams can be elicited in the the ECR ion source. The working principle and the structure of this ECR ion source are introduced, the main parame- ters and pulse wave shape measured are given.