AIB用于改进PLD沉积在机械瓣膜上的类金刚石膜的质量

Argon ion bombardment to improve diamond-like carbon film deposited on mechanical heart valve by pulsed laser deposition

用脉冲激光沉积(PLD)法在热解C制作的人工心脏机械瓣膜上沉积类金刚石(DLC)薄膜,并用3KeV的氩离子轰击(AIB)DLC薄膜。采用拉曼(Raman)光谱和X射线光电子能谱(XPS)分别对AIB前后的DLC薄膜进行检测分析,用光学显微镜观察AIB前后的DLC薄膜表面。实验结果表明:AIB不影响薄膜的黏附性。但是可以在一定程度上导致薄膜微观结构的变化和sp3/sp2比值的提高,可以在薄膜中掺杂微量的Ar元素,可以有效消除薄膜表面吸附的O,但对薄膜中C-O、C=O和COOH的影响较小。因此,离子轰击法可以作为一种改进类金刚石薄膜质量的方法。

Argon ion bombardment（AIB） is used to improve the diamond-like carbon（DLC） films on the mechanical heart valve made from pyrolytic carbon.The DLC film is deposited by the pulsed laser deposition（PLD）.The microstructure of the DLC films is investigated by the visible Raman spectroscopy and the X-ray photoelectron spectroscopy（XPS） before and after AIB,respectively;and the surface of DLC film is observed with microscope before and after AIB,respectively.The experimental results demonstrate that the AIB is unable to cause corrugation or desquamation of the DLC films,but it modifies the film microstructure,enhances the ratio of sp3/sp2at certain extent,dopes a little argon in the film,and decrease oxygen on the film effectively,but it couidn＇t decrease C-O;C=O and COOH in the films effectively.