圆筒型永磁同步直线电机偏心驱动模式下的纳米定位控制

Nanometer Positioning Control of Tubular Permanent Magnet Synchronous Linear Motor Based on Eccentric Actuation Mode

分析圆筒型永磁同步直线电机(TPMSLM)定位波动产生原因,提出由TPMSLM定子和动子偏心安装产生电磁阻尼,与导轨密封垫阻尼结合来吸收和抑制电磁扰动引起的推力波动,以达到精确定位的目的。采用偏心结构在电机内构建一个作用类似于旋转电机滚珠丝杆传动机构的"中间环节",分析表明TPMSLM定子和动子偏心量与电磁扰动抑制能力成正比关系,当TPMSLM定子和动子偏心后的低端缝隙δ≤0.2mm时,其电磁扰动抑制能力提高了近10倍。此外实验也显示了导轨密封垫阻尼能吸收50%左右的电磁扰动量,实验证实了本文分析的正确性。

This paper analyzes the reasons causing positioning fluctuations of tubular permanent magnet synchronous linear motor （TPMSLM） and puts forward the electromagnetic damping generated by eccentric installation of stator and rotor of TPMSLM combined with the damping caused by dust protected seal of guide to absorb the thrust fluctuations aroused by electromagnetic disturbances in order to achieve the accurate positioning. In this paper, the eccentric structure in motor is adopted to establish an ＂intermediate link＂ that is similar to the ball screw drive mechanism of rotating motor. The analysis shows that the eccentric displacement of stator and rotor of TPMSLM is directly proportional to the suppression of electromagnetic disturbance. When down side gap of stator and rotor is eccentrically set to less than 0.2mm, the ability of electromagnetic disturbance suppression is increased to nearly 10 times. The experiment also shows that the seal damping of guide can absorb about 50% of the amount of electromagnetic disturbances.