硬质合金表面热阴极离子镀TiN涂层抗氧化性研究

Oxidation Resistance of TiN Coating on the Surface of Cemented Carbide by Hot Cathode Ion Plating

利用热阴极离子镀技术在牌号为ZK1的硬质合金表面镀制TiN硬质涂层,并在300℃至700℃空气环境下进行抗氧化实验。运用XRD和XPS对涂层进行微观结构和成分的分析,并用SEM进行涂层断口的观察,最后采用显微硬度计和自动划痕仪分別对涂层的显微硬度和膜基结合力进行了检测。实验结果表明,涂层厚度约为5μm,涂层成分以TiN为主,平均显微硬度达2388HV,结合力最大达85N。随着氧化温度的升高,在涂层表面先后形成了TiNxOy、TiO2,涂层的显微硬度和膜基结合力都呈下降趋势并在550℃处剧烈下降。

In this study,the authors deposited a layer of TiN coating on the surface of cemented carbide ZK1 using hot cathode ion plating technology,and conducted oxidation resisting experiment at the temperature between 300℃ and 700℃ in air condition.The micro-structure and componential analysis was conducted by using XRD and XPS;the fracture property was detected with SEM.The micro hardness was tested by micro-hardness tester and the adhesion strength was tested with a scratch tester.The experimental results show that the coating has an average thickness of 5μm,the main component is TiN,with an average micro-hardness of 2388HV and the max adhesion strength achieves 85N.With the increase in temperature,the component of the coating changes to TiNxOy and TiO2 later.Both the micro-hardness and adhesion strength have a falling trend when temperature increases.