摘要
介绍了应用原子力显微镜（ＡＦＭ）扫描测量超精密加工用金刚石刀具刃口半径的方法，给出了测量图象和测量结果。该方法可提高金刚石刀具刃口半径的测量精度，对进一步分析刃口参数对超精密加工表面质量的影响具有一定指导意义。
On the basis of scanning probe theory, a new method for measuring the cutting edge radius of diamond tools used in ultra-precision machining is proposed. By this method, the measaing accuracy is improved. The measuring images and the analyzing results of measuring errors are given. The method also has a directive significance to the analysis of the influence of cutting edge radius on surface quality.
出处
《工具技术》
北大核心
1999年第1期30-32,共3页
Tool Engineering
基金
"九五"国防重点预研项目"纳米加工与检测"资助项目
关键词
金刚石刀具
刃口半径
测量
原子力显微镜
diamond tool measurement of cutting edge radius atomic force microscope(AFM)
